Vacuum system Meridian is an effective system for high-rate deposition of high-precision optical coatings for a wide range of applications.Meridian system helps to obtain thin films of a variety of materials with high accuracy and excellent quality.Optical controlallows to make the processes fully automatic and increase the yield significantly.
KEY BENEFITS:
Long throw sputtering configuration enabling particle free coating processes
Sputter-Up configuration
High-yield dual-magnetron AC sputtering systems
Long life RF plasma sources for precleaning and assisting
On-substrate direct Optical monitoring system lzovac OCP
Double rotation planetary substrate holder allows mounting of different
substrate sizes (200,250 and 300mm)
APPLICATION:
TECHNICAL DATA:
