Vacuum coating systems with electron beam evaporation technology for  UV, Visible, near and mid-IR ranges

Examples of use:

• Anti-reflective coatings

• Beam splitters

• Narrowband pass filters

• High reflective coatings

• Polarizers

• Laser optics

• IR coatings on various substrates

• UV coatings

Features and equipment:

• Dome or planetary substrate holder

• Customized holders for non-standard substrates

• Up to 2 electron beam evaporation systems with different crucibles

• Resistive evaporation source

• Ion-beam assist source of various types (ALS (Anode Layer Plasma Acceleration source), End-Hall ion source, RF ion source)

• Fully automatic process control system by coatings optical parameters

• Substrate heating system

Technological devices:

• Electron-beam evaporation system

• Resistive evaporation system

• RF Ion-beam source for cleaning and assisting

• Ion-beam source for cleaning and assisting (ALS or End-Hall)

Technical data: