Ion beam sputtering system for high-precision optics with high productivity
Vacuum system is equipped with RF ion-beam sputtering source, RF ion-beam source for cleaning and assisting, RF neutralizer. Broadband and Single Wave optical monitoring system allows to perform the technological processes in full-automatic mode and increases the system yield significantly. Using of dry (oil-free) pumping system, ultra-high vacuum coater design as well as load-lock vacuum chamber with robotic arm for substrates loading allow to reach maximal purity of the technological processe.
Technological devices:
Examples of use:
High power laser mirrors
Bandpass filters
Notch filters
Polarisers
Beam splitters
Rugate filters
Broadband anti-reflection coatings
AR coatings on laser diodes
Coatings on optical fibers
Low defect and low optical loss coatings
Multi-layers filters (>100 layers) with high requirements to precision and thickness control
Coating quality:
Low defectiveness of coatings
Low scatter and absorption loss
High Laser Damage Threshold (LIDT)
Low surface roughness
High density
Excellent adhesion
Low sensitivity to humidity
Technical data:
