Vacuum system with ion-beam plasma-chemical deposition (Ion Beam CVD) of diamond-like coatings (DLC) technology

DIAMANTA vacuum system is intended for deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. DLC coatings are antireflective as well in IR range in 3-5 µm and 7-14 µm.

The method of deposition is chemical deposition of carbon from the gas phase stimulated by plasma of an ion-beam source.

Examples of use:

• Night vision devices

• Thermal imagers

• Pyrometers

• Optical systems for lenses

Technological devices:

• Ion-beam sputtering source

• Ion-beam cleaning source

Features:

• Unique method of DLC film deposition

• Single wave optical monitoring system

• Load-lock vacuum chamber

• Full automation of the process

Technical data: