Radio-frequency electron source (neutraliser) RFN-25 is designed for use in technological vacuum systems together with ion sources to minimise and/or neutralise the volume or surface charge of plasma by emitting a stream of electrons mixed with a stream of ions and forming a beam of quasi-neutral plasma.
Device: Operation of ion beam technological device RFN-25 is based on the general principle of gas discharge creation by means of RF inductor with the use of a pulling electrode. An inductive coil is wound around the discharge chamber consisting of dielectric material permeable to the RF field. This coil receives an AC voltage from the power supply, which is then adjusted by the matching unit.
A working gas is fed into the discharge chamber via an insulator. The gas is ionised by the eddy currents. The electrons are drawn out by an anode to which a positive voltage of 25 V is applied. The same anode serves to maintain the discharge in the interior of the discharge chamber.
A negative bias is applied to the collector, which attracts the positive ions formed in the discharge chamber. By controlling the collector voltage, the emission current can be adjusted.

Purpose:
Electron sources are used as compensators for ion beams emitted by various types and models of ion beam devices. They are most often used as part of R3hfF ion sources.

Problems solved:
– electron source for ion beam compensation to reduce coating defects.