The electron source is a neutraliser based on a gas discharge inverse magnetron and is designed to compensate the spatial charge of the ion beam.

In the working volume limited by a cylindrical graphite target, a magnetron discharge is formed due to the interaction of process gas and crossed magnetic and electric fields. Closed magnetic field lines localise the plasma on the surface of the target-cathode. Electrons emitted from the cathode surface and generated in the plasma by ion bombardment are accelerated towards the ion beam and compensate for it.

Application:

Electron sources are used as compensators for ion beams emitted by various types and models of ion beam devices.

Main task:

– source of electrons for ions discharge compensation on a substrate for coating defects elimination.

Magnetron neutralizer is used in Diamanta.

Technical data: